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KMID : 0545120000100040554
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Journal of Microbiology and Biotechnology
2000 Volume.10 No. 4 p.554 ~ p.558
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Isolation and Characterization of Biofouling Bacteria in Ultra-High Purity Water Used in the Semiconductor Manufacturing Process
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Kim In-Seop
Lee Kye-Joon
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Abstract
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Bacteria were isolated and identified from an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16-megabyte DRAM semiconductor manufacturing. Scanning electron microscopic and microbiological observations revealed that the primary source of the bacteria isolated from the UHPW was detached cells from biofilms developed on the pipe wall through which the UHPW, a manmade and extremely nutrient poor environment, was passing. About 63-65% of the bacteria isolated from the UHPW and the pipe wall were Gram-positive, whereas only 10% of the bacteria isolated from the feed water were Gram-positive. The UHPW bacteria were a diverse group, including nine genera of Gram-positive bacteria and seven genera of Gram-negative bacteria. Strains of the UHPW bacteria effectively adhered to and formed a biofilm on the surface of polyvinyl chloride (PVC) pipe.
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